Delray Beach, Florida, August 13, 2015
RAVE LLC recently announced receipt of a multi-system purchase order for its Rhazer haze removal systems from one of the world’s leading independent semiconductor memory device manufacturers, extending their commitment to the Rhazer technology.
Rhazer is a breakthrough dry cleaning system for the non-invasive, through pellicle removal of photo-induced defect contamination (haze) from advanced photomasks. Rhazer systems are designed for dedicated operation in the wafer fab to fast-turn haze contaminated masks from the lithography line, avoiding the risky and time consuming return to the mask shop and the optical performance damage associated with repeated wet clean processing.
The Customer had previously conducted an extensive evaluation of the Rhazer system and determined the Rhazer haze removal process demonstrated the potential to add significant value to their wafer lithography operations. Their results showed the Rhazer system was not only effective at removing all forms of haze contamination, but that the Rhazer process actually cleans the mask surfaces of haze producing contaminates. Use of Rhazer in a preventive maintenance mode revealed the process continues to remove impurities and increases the absorber film density, both of which help to inhibit future haze formation. Their study also verified that the Rhazer process can be applied as often as needed with no effect on the Phase or Transmission of the mask absorbers and no degradation of the Critical Dimensions of the patterned features.
The Customer study resulted in purchase orders to RAVE for multiple Rhazer tools. The first Rhazer system from this purchase order has already been installed and accepted. Additional systems are scheduled for delivery this year to several different wafer fab operations.
RAVE CEO, Barry Hopkins, remarked “Rhazer tools are now operating successfully in wafer fabrication centers around the world. RAVE is very pleased to extend our relationship with this Customer as a part of the growing list of high-volume memory device manufacturers using Rhazer technology as part of their haze management portfolio. These latest purchase orders continue to validate the significant cost savings and value contribution RAVE products bring to our global customer base.”
About RAVE LLC
RAVE LLC is a global supplier of advanced process solutions to the Semiconductor and Photomask industries. Since 2000, RAVE has been recognized as a leading-edge production equipment supplier. RAVE is headquartered in Delray Beach, Florida, USA and maintains sales and service offices in Asia, Europe and the USA. All product and service names are trademarks or registered trademarks. This press release contains forward-looking statements. The Companies undertake no obligation to update the forward-looking statements contained herein to reflect events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.