fp650 - Advanced Femtopulse Laser Photomask Repair Systemr
The fp650 is designed to deliver a broad range of mask repair capabilities at very high throughput (>200 masks per week) including bulk removal (image reconstruction) on a wide variety of mask absorber materials. The fp650 incorporates world class optical and mechanical components managed by RAVE’s easy-to-use, production operations software to provide customers the optimum combination of large and small area image reconstruction with leading edge 65nm design rule mask repair capability at the lowest cost of ownership.

• Femtosecond pulsed laser system
  
  
• DUV Optics – Transmitted and Reflected
  
  
• World class X,Y, and Z multi-level stage control
  
  
• Laser controlled mask positioning stage control
  
  
• Comprehensive pattern copy of large and complex geometries

:: fp650 - Key Benefits

• Very high repair throughput (including large defects) and extendable accuracy guarantees accelerated ROI (especially when used to replace obsolete, older, slower and less capable existing laser and FIB mask repair systems)
  
  
• Non-thermal repair process eliminates thermal diffusion and minimizes splatter and roll-up
  
  
• Sub-100nm resolution and feature repair
  
  
• Real-time repair viewing and Actinic imaging at 248nm that allows for real-time dispositioning
  
  
• Though pellicle repair capability
  
  
• Precise, damage-free repairs producing >95% transmission